MOVPE laboratory - Prague, research, topics

RESEARCH of the MOVPE laboratory, Department of Semiconductors, Institute of Physics Academy of Sciences of the Czech Republic, Prague
EQUIPMENT TOPICS PROJECTS	Links: Institute of Physics Department of Semiconductors Staff Publications Projects MOVPE homepage
EQUIPMENT The MOVPE growth system is AIXTRON 200 with RF heating and horizontal reactor, N₂ glove box and Pd diffused H₂ as a transport gas.
Source materials: TMGa, TEGa, TMAl, TtBAl, TMIn, TDMASb, TESb, AsH₃, tBAsH₂ Doping materials: DETe, SiH₄, CCl₄, DEZn
Supporting equipment: HV - UHV evaporation station (Perkin Elmer) with annealing and alloying facilities Ultrasound wire bounder He leak detector Orbital welder Mass spectroscopy Substrate orientation and cutting facilities In house diagnostic techniques in co-operating groups: Scanning electron microscopy and x-ray microanalysis High resolution photo and electroluminescence in a wide range down to 1-2K Transport measurements in a wide temperature range down to 4,2K, DLTS, PITS, Measurements under hydrostatic pressure High resolution x-ray diffraction STM and UHV-AFM AFM "EXPLORER" (Thermomicroscopes) grinding and polishing late Raman spectroscopy TOPICS GaAs/AlGaAs - planar waveguides, Quantum Wells (QW), Multi QW (MQW), delta doping with Si GaAs/InGaAs - QW, MQW, Quantum Dots (QD), QW and QD based lasers GaAs/InAlAs - QW,MQW GaSb, GaAsSb, InAsSb, InGaSb - layers and structures
e-mail address: movpe@fzu.cz