Multilayer X-ray Optics - Periodic X-ray multilayers

We deposit X-ray molybdenum/silicon multilayer system, which can be used in the range from about 12 – 30 nm. Peak reflectance values are approaching 70% for normal incidence.

At very short X-ray wavelengths (wavelengths below about 4 nm) efficient normal incidence multilayers cannot be produced because interface roughness cause too much reduction in the reflectance. However periodic multilayers can still be used at near grazing incidence. They provide high reflectance at graze angles that are much larger than what can be achieved with single-layer coatings.

Cross-sectional transmission electron micrograph of a Mo/Si multilayer deposited in our laboratory Typical normal incidence x-ray refraction dependence of the Mo/Si mirror deposited in our laboratory