CZ 17135 U1 , Úřad průmyslového vlastnictví, Zápis užitného vzoru ze dne 8.1.2007
The system falls into the area of technological methods of deposition thin ferroelectric films with the aid of plasmochemical reactions. The system involves the design for realisation of deposition of perovskite layers, especially thin films' structures of the BaxSr1-xTiO3 type.
