Vapor pressure of metal organic precursors – an overview, new results, and future plans
Metalorganic Vapor Phase Epitaxy and other epitaxial techniques use a broad variety of organometallic precursors. The correct and exact knowledge of the essential physical and chemical parameters is necessary for precise technological application of these materials during technological processes and for growth modeling. In particular volatility data and a detailed vapor pressure equation is essential for controlled precursor dosimetry and thermodynamic analysis of MOVPE growth. (více ...)
