In our laboratory, we use cold cylindrical Langmuir probe for precise spatial and temporal measurements of basic plasma parameters i.e. plasma potential, floating potential, plasma density and mean electron energy. Besides, we developed the calorimeter probe suitable for application in all the plasma systems. Since the calorimeter probe enables to measure absolute value of the total energy flux density, this probe is utilized for measurements of energy conditions on the substrate during deposition process. The full text >>
