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Sputtering of a silicon surface: Preferential sputtering of surface impurities.
Autoři publikace:
Nietiadi, M.L.
Rosandi, Y.
Lorinčík, J.
Urbassek, H.M.
Rok:
2013
DOI:
10.1016/j.nimb.2012.09.023
Bibliografický formát:
Nietiadi, M.L. ; Rosandi, Y. ; Lorinčík, Jan ; Urbassek, H.M. Sputtering of a silicon surface: Preferential sputtering of surface impurities. Nuclear Instruments & Methods in Physics Research Section B (2013)
