Home » Publications » A molecular dynamics simulation of the effect of near-surface gas-phase collisions on final velocities of sputtered ions.
A molecular dynamics simulation of the effect of near-surface gas-phase collisions on final velocities of sputtered ions.
Authors:
Kuba, P.
Lorinčík, J.
Anders, C.
Urbassek, H.M.
Year:
2013
DOI:
10.1002/sia.4964
Bibliography format:
Kuba, P. ; Lorinčík, Jan ; Anders, C. ; Urbassek, H.M. A molecular dynamics simulation of the effect of near-surface gas-phase collisions on final velocities of sputtered ions. Surface and Interface Analysis (2013)
