NANOMAG
UHV stainless steel chamber for the combination of:
- pulsed laser deposition (multi-target systems),
- magnetron sputtering (dual UHV magnetrons - 2 inch standard and 3 inch suitable for magnetic materials),
- ECR ion source,
- separated analyses chamber from Mu-metal, the samples can be transferred there under the UHV
- Low-energy electron diffraction (LEED) (Omicron)
- Auger electron spectroscopy (AES)
Deposited materials: magnetic materials: Fe, Co, Ni, FePt, NiCo
FLUORKA
UHV stainless steel chamber for the combination of:
- pulsed laser deposition
- e-beam evaporation
- magnetron sputtering
- auxiliary ion beam source>
Deposited materials: fluorides (doped with rare-earth metals), ZnO, alumina
