Structural properties and mechanisms of formation of surface
nanostructure on metal as well as semiconductor substrates are
investigated by numerical simulations. The objective is to explain
formation of nanostructures on the microscopic level and by this
provide interpretation of resent experiments. Molecular dynamics and
Monte-Carlo simulations are combined with approximative analytical
methods to achieve description of relevant statistical mechanical
quantities during growth by molecular beam epitaxy or by pulsed laser