Laboratory of electron and ion microscopy and microanalysis
Characterization of surfaces by scanning electron microscopy, energy dispersive X-ray spectroscopy, cathodoluminescence and secondary ion mass spectrometry FIB TOF SIMS
Scanning electron microscope TESCAN LYRA3 GM with SE and BSE detectors in the chamber, In-beam SE a In-beam BSE detectors in the column, FIB source of Ga+ ions, gas injection system of 5 gases, TOF mass spectrometer, decontaminator.
