Ion Beam Techniques for Characterization and Modification of Nano-Structured Materials

Ions accelerated to high energies are used for modification and characterization of surface layers of solids. The study of surfaces and surface structures with specific physico-chemical properties is of great importance for development of modern technologies tending to miniaturization. Laboratory at Nuclear Physics Institute AS is equipped with 3.0 MV Tandetron 4130MC and 3.5 MV Van de Graaff accelerators and devices for creation and modification of surface structures by different deposition techniques and ion implantation. The nano- and micro-structured materials are characterized by RBS, RBS-channeling, ERDA techniques based on ion elastic scattering and by PIXE and PIGE methods based on registration of X- and gamma-rays exited by light ions. Main research areas are surface coatings and structures with specific mechanical, and biological properties, structures with possible applications in opto-electronic and microelectronics and processes of diffusion and self-organization in multi-component systems. Ion microprobe is used for 3-dimensional characterization of micro-structured samples (e.g. aerosol deposits, biological objects, microelectronic and optoelectronic structures). The interdisciplinary fundamental and applied research is performed in close collaboration with other research institutes and universities in Czech Republic and abroad.

     

Nuclear Physics Institute of the ASCR