The project deals the utilization of an advanced thin-film plasma technology in a vacuum and microwave technique. It is expected a significant
improvement on a serviceability of the final products.
The project deals with preparation of chemical gas sensors based on sensitive layers of
nanocomposite of organic substance (phthalocyanines, metallocenes) and metallic nanoparticles.
The sensitive layers are prepared by technology of organic molecular evaporation in ultra-high
vacuum. The metallic nanoparticles are prepared by means of magnetron sputtering or thermal evaporation. The formation of nanoparticles is stimulated by subsequent thermal treatment. The full text >>
The aim of the project is to develop methods for monitoring of preparation of metallic nanostructures on dielectric surface in deposition systems involving combination of magnetron sputtering, pulsed laser deposition and ion beam assistance.
