Mass spectroscopy
EQP 500 HIDEN Analytical Mass Spectrometer
- orifice with input diameter 100 - 300 μm,
- mass spectra range 0 - 500 amu
- Residual gas analyses
- Ion energy distribution
Optical emission spectroscopy
Monochromator Triax iHR550
- gratings 1200 g/mm or 2400 g/mm,
- wavelength region 350 - 900 nm,
- ultimate resolution of 0.012 nm,
CCD camera, Symphony (2048 x 512)
- UV-VIS, back iluminated,
- liquid-nitrogen cooled.
Photomultiplier Hamammatsu R955
- temporal and spatial resolved plasma diagnostic
- excitation temperatures estimation
