Laser absorption spectroscopy
Laser beam welding
Laser welding head
Diffractive optical element
Optically levitated nanoparticle
Electron beam welder
Special electronics
Microscope for slow electrons
Identification of biomass using Raman spectroscopy

Speciální technologie

Ivana Vlčková

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EBL for Nanotechnologies

Elektronový litograf Tesla BS600 Read more about EBL for Nanotechnologies

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Industrial Holography using E-Beam Lithography

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Large-area micro structures as optical elements for shaping of laser beam;
Sub-micron holographic structure in the application area of industrial holography;
DOVID — Diffractive Optically Variable Image Device

Results

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Microlithography Techniques

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Technology of structures prepared in thin layers of metal and dielectrics on silicon or glass substrates. Combined electron beam lithography.

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Nanolithohgraphy

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Publications - Electron Lithography

Journal Article Read more about Publications - Electron Lithography

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Publications - Electron Beam Technology

Journal Read more about Publications - Electron Beam Technology

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Publications - Thin Layers

Journal Article Read more about Publications - Thin Layers

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Mgr. Josef Daniel

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Ing. Ivan Vlček, Ph.D.

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