Diagnostika plazmatu

Mass spectroscopy

EQP 500 HIDEN Analytical Mass Spectrometer

• orifice with input diameter 100 - 300 μm,
• mass spectra range 0 - 500 amu

- Residual gas analyses
- Ion energy distribution

Optical emission spectroscopy

Monochromator Triax iHR550

• gratings 1200 g/mm or 2400 g/mm,
• wavelength region 350 - 900 nm,
• ultimate resolution of 0.012 nm,

CCD camera, Symphony (2048 x 512)

• UV-VIS, back iluminated,
• liquid-nitrogen cooled.

Photomultiplier Hamammatsu R955
- temporal and spatial resolved plasma diagnostic
- excitation temperatures estimation