System for the deposition of perovskite layers

CZ 17135 U1 ,
Industrial Property Office,
Utility model registration from 8.1.2007

The system falls into the area of technological methods of deposition thin ferroelectric films with the aid of plasmochemical reactions. The system involves the design for realisation of deposition of perovskite layers, especially thin films' structures of the Ba_xSr_1-xTiO₃ type.