Mechanical structures with nanostructured composite coatings deposited by high power impulse magnetron sputtering

Reactive high power pulsed magnetron sputtering system (r-HIPIMS) was used for the deposition of nanocomposite layers CuCN_x on milling tools. This coating damps vibration of this tool during a milling process. This coating is composed of composite layers CuCN_x and metallic Cu interlayers. These interlayers improved adhesion and cohesion of this coating and further increased damping of mechanical vibration. These multilayers were deposited by the r-HIPIMS magnetron with copper target and reactive gasses C₂H₂ and N₂.

Reactive high power pulsed magnetron sputtering system.

¹KTH Royal Institute of Technology, Sweden
²Plasmatrix Materials AB, Apoteksvägen 16 A, 741 42 Knivsta, Uppsala län, Sweden
³Microelectronics and Materials Physics Laboratories, P.O. Box 4500, FI-90014 University of Oulu, Finland
⁴Materials Engineering, P.O. Box 4200, FI-90014 University of Oulu, Finland
⁵Institute for Industrial Manufacturing and Management (IFF), University Stuttgart, Germany
⁶Institute of Physics AS CR, Prague, Czech Republic