Deposition of interference coatings by electron beam evaporation and spectrophotometric measurement of spectral reflectance and transmittance

Thin layer coatings are prepared by means of electron beam evaporation using a Balzers BAK550 coater equipped with two electron guns. Substrates can be preheated. Our coater is capable of small batch production of circular substrates with the largest diameter of 180mm or rectangles up to 170mm x 120mm. The following materials can be deposited: TiO₂, SiO₂, Ta₂O₅, ZrO₂, CeO₂, HfO₂, Y₂O₃, MgO, Al₂O₃, MgF₂ and Na₃AlF₆. Application: Interference filters for visible, near UV and near IR part of the spectrum. For example:

• anti-reflection coatings,
• low-loss mirrors,
• cold mirrors,
• heat mirrors,
• dichroic filters,
• bandpass and edge filters,
• beamsplitters,
• polarizers,
• nonpolarizing beamsplitters
• monochromatic filters

Spectral reflectance and transmittance measurements are performed using a Varian Cary 5E spectrophotometer.