RBS channeling

RBS-channeling spectrometry - enables us to investigate crystalline materials.

RBS channeling is based on channeling of charged particles in single crystalline structure and back-scattered ion yields in the spectra when the beam is parallel to crystallographic orientation axis can give us information about the damage and disorder depth profiles, dopant positioning and damage depth accumulation. For RBS channeling are typically used ion beams of  1-2 MeV He⁺ ions. Simultaneous acquisition of back-scattered ions and induced X-ray emitted via RBS and PIXE detectors depending on impinging ion beam angle can give us comprehensive information about even lighter dopant positions in heavy element matrix.