Anotace
The overall direct objective of the TAKEMI5 project is to enable the participating European leading companies (Large Enterprises and SMEs) and R&D institutes in the domains of EUV Lithography, Multidimensional Metrology and Process Development & Integration for the Semiconductors industry, to develop jointly, so with transdisciplinary cooperation, the technology capabilities which presently aim at early 5nm node manufacturing in 2020.