High-tech cooling sample holder with integrated detection of electrons and control software for optimization of the thermodynamic conditions in the ESEM specimen chambre

This project combines experimental development and industrial research provided by a two-member consortium – NUM solution s.r.o. and Institute of Scientific Instruments of the CAS, v. v. i. The subject of this project is research and development of control AW for optimization of thermodynamic conditions in the specimen chamber and research and development of a new cooling stage for samples with integrated high-efficiency ionization detector of signal electrons for scanning and environmental scanning electron microscopes.