Ing. Michal Novotný, Ph.D.

Zástupce vedoucího oddělení 28

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thin film deposition techniques (PLD, magnetron sputtering, ion beam sputtering, e-beam and thermal evaporation)
hybrid laser deposition systems - combinations of PLD and discharges, magnetron sputtering, ion beam and vacuum evaporation
preparation of nanostructured, multilayered, gradient and doped thin films
in-situ monitoring techniques of film growth – electrical and optical properties
chemical gas sensors
plasma diagnostics (optical emission spectroscopy and mass spectroscopy)
laser processing and annealing