Pyrolytic and photolytic approach or the deposition of novel Si/Ge/C materials.
Grant Agency
Grant Agency of the Academy of Sciences of the Czech Republic
Topics
Chemistry of Surfaces, Interfaces and Thin Films (Photoelectron Spectroscopy).
Surface Interactions on Metals.
Year from
2006
Year to
2008
Abstract:
The project will deal with the production of novel Si/Ge/C materials by means of laser CVD and ablative decomposition and spin-coating techniques. The goal of the project is i) preparation of Si/Ge/C films by several deposition techniques and ii) description and elucidation of the deposition processes and properties of the deposited Si/Ge/C films dependent on the starting silagermane precursor [HMe2SiGeMe3, HMe2SiCH2GeMe3, (CH2)3Ge(Me2HSi)2]or polymer containing Si and Ge, deposition conditions, temperature of the substrate and other experimental parameters. The project will introduce the novel up-to-date materials whose application is expected to be in micro- and optoelectronics.
The project will deal with the production of novel Si/Ge/C materials by means of laser CVD and ablative decomposition and spin-coating techniques. The goal of the project is i) preparation of Si/Ge/C films by several deposition techniques and ii) description and elucidation of the deposition processes and properties of the deposited Si/Ge/C films dependent on the starting silagermane precursor [HMe2SiGeMe3, HMe2SiCH2GeMe3, (CH2)3Ge(Me2HSi)2]or polymer containing Si and Ge, deposition conditions, temperature of the substrate and other experimental parameters. The project will introduce the novel up-to-date materials whose application is expected to be in micro- and optoelectronics.
RNDr. Bastl Zdeněk CSc.
E-mail
zdenek.bastl
jh-inst.cas.cz
jh-inst.cas.cz
Room
234, 207, 204
Department
Extension
+420 26605 3526, 3466, 3456
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