Research

1. Properties of low pressure plasma study by means of mass spectrometry 2. Laser deposition and thin films study for optics, industries and medicine 3. Optical properties of solids study in vacuum ultraviolet spectral range
	Properties of low pressure plasma study by means of mass spectrometry: Mass spectrometry of low pressure plasma. Measurement of concentration of neutral molecules and radicals by means of MBMS. Microwave electron-cyclotron-resonance PE CVD. Magnetron sputtering. more info ...
	Laser deposition and thin films study for optics, industries and medicine: Development of multilayers, gradient and nanocomposite films. Development and study of technology hybrid laser deposition - laser, magnetron and discharge combination. Development of planar waveguide lasers, thin films gas sensor etc. more info ...
	Optical properties of solids study in vacuum ultraviolet spectral range: Measuring the reflection and transmission spectra of solids in the vacuum ultraviolet (VUV) region. The use of a vacuum monochromator substantially enlarges the domain in which optical properties of solids are usually studied by spectroscopic ellipsometers. more info ...