Characterization of surfaces by scanning electron microscopy, energy dispersive X-ray spectroscopy, cathodoluminescence and secondary ion mass spectrometry FIB TOF SIMS
Scanning electron microscope Philips XL30 ESEM with SE and BSE detectors in the chamber, EDX detector and cathodoluminescence detector.
Carbon coater Quorum Technologies Q150R E.
Optical microscope OLYMPUS BX51 with Nomarski contrast